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 2023/6/10    18:33         2180 Yokogawa FA-M3_Ethernet.cfg
 2023/6/10    18:33        21235 Yokogawa FA-M3_Ethernet.so
 2023/6/10    18:33         2175 Yokogawa FA-M3_UDP.cfg
 2023/6/10    18:33        21385 Yokogawa FA-M3_UDP.so